采用直流.示差脉冲组合电沉积技术,以(Ru-Sn)Clx水溶液为沉积液,通过后续热处理工艺制备超级电容器用钽基(Ru-sn)O2·nH2O薄膜电极材料.借助扫描电镜(SEM)、X射线衍射(XRD)仪,X射线光电子能谱(XPS)和电化学分析仪,研究前驱体(Ru-Sn)Ck转化为(Ru-Sn)O2·nH2O的物相演变及其微观形貌和电容性能.结果表明:合适的热处理工艺能使前驱体(Ru-Sn)Clx转化为(Ru-Sn)O2·nH2O薄膜,提高薄膜与钽基体的附着力(达到12.3 MPa);在溶液中加入SnCl2能改善薄膜内部的结合力;随着SnCl2含量的增加,薄膜单位面积的质量增加;薄膜单位面积的电容量先升高后降低,最大值为1.9 F/cm2;而比电容则呈现单调下降趋势.
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