采用完整热力学平衡分析验证了自愈合相段C的产物是温度和初始气体摩尔比的函数.结果表明,凝聚相的成分与温度和气体的摩尔比(如BCl3∶(BCl3+CH4)、H2∶(BCl3+CH4))密切相关.BxC的理想沉积条件是:BCl3∶(BCl3+CH4)之比为0.8,H2∶(BCl3+CH4)之比在10～105.2之间,而温度应高于950 K.材料的富碳或者富硼主要通过调整BCl3∶(BCl3+CH4)和H2∶(BC13+CH4)的气体摩尔比来控制.
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