采用射频反应磁控溅射法在玻璃衬底上制备了具有c轴高择优取向的ZnO薄膜,利用X射线衍射仪、扫描探针显微镜及紫外分光光度计研究了生长温度对ZnO薄膜的结构及光学吸收和透射特性的影响.结果表明,合适的衬底温度有利于提高ZnO薄膜的结晶质量;薄膜在紫外区显示出较强的光吸收,在可见光区的平均透过率达到90%以上,且随着衬底温度的升高,薄膜的光学带隙减小、吸收边红移.采用量子限域模型对薄膜的光学带隙作了相应的理论计算,计算结果与实验值符合得较好.
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