用XeCl紫外与CO2红外复合激光化学气相沉积方法,在340℃硅衬底上沉积成高纯金刚石膜。
Diamond films have been synthesized by LCVD through combined effect of ultraviolet XeCl laser and infrared CO2 laser. The substrates are Si wafers. A special apparatus has been developed. The deposition conditions have been studied. Raman spectra of the f
参考文献
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| [2] | KitahamaK,HirataK,NakamatsuH,KawaiS．ApplPhysLett,1986、49(1):6342GotoY,YagiT,NagaiH．MatResSocSympProc,1989,129:2133TyndallGeorgeW．HackerNigelP．MatResSocSymp,1990,162 |
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