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利用中频反应磁控溅射技术在铝合金表面成功制备TiN薄膜,通过改变氮气流量、溅射时间、靶功率可以在铝合金表面沉积不同颜色、不同附着力、不同硬度的TiN薄膜,显著改善铝合金表面的性能.采用国际照明委员会CIE1976(L*、a*、b*)来标定薄膜颜色,利用CM-2600d分光测色计研究TiN薄膜的反射率曲线、色差及色彩仿真;采用划格法测量附着力大小并评级;采用MH-6显微硬度计测量TiN薄膜硬度.结果表明,当氮气流量为18 mL/min溅射时间为10 min,靶功率为5 kW时,TiN薄膜呈仿金色,薄膜附着力评为0级,薄膜硬度为427.8 HV,TiN薄膜具有优良的性能.

参考文献

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