根据非平衡热力学耦合模型理论首次计算得到了碳氢氮体系的金刚石生长的非平衡定态相图与近几年在国际上发表的该体系实验结果相符合，可以为今后的实验研究提供定量化的理论依据．根据理论相图讨论了系统压力和体系中氮的添加对金刚石薄膜淀积条件的影响．
Non-equilibrium stationary phase diagrams for diamond growth with nitrogen addition into the reaction system were calculated and coordinate
well with published experimental results. Therefore they can direct the experimental research on the subject. The effects of nitrogen addition on
the deposition of diamond films were discussed by using the phase diagrams. The nitrogen addition can accelerate the deposition rate of diamond films
in two aspects: enhance the CH3 concentration at the growth surface and accelerate the abstraction of H atoms covered the growth surface sites.
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