金刚石及相关薄膜材料指的是金刚石薄膜和立方氮化硼薄膜,它们的制备技术被称为"新金刚石技术".评述了这类材料制备技术研究进展,指出成核及生长机理的研究将是它们走向实用化的关键.
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