综述了国内外Parylene膜光降解的研究现状和进展,介绍了Parylene 膜光降解的机理和一些直观现象,并阐述了光解后Parylene膜的光学性能、热力学性能、电学性能以及透湿透气等性能的变化,为以后Parylene膜的光降解研究提供了方向,为设计使用条件提供了依据.
参考文献
| [1] | 吴礼群.Parylene敷形涂层[J].电子机械工程,2004(06):51-53,61. |
| [2] | 王永刚.Parylene-一种新型机载设备覆型防护涂层材料[J].航空精密制造技术,2002(01):16-18,33. |
| [3] | 龚德才;奚三彩;王勉.派拉纶成膜技术在文物及图书保护中的应用研究[J].功能材料与器件学报,1996(08):29. |
| [4] | Senkevich J.J.;Desu S.B. .Temperature studies of optical birefringence and X-ray diffraction with poly(p-xylylene),poly(chloro-p-xylylene)and poly(tetrafluoro-p-xylylene)CVD thin films[J].Polymer: The International Journal for the Science and Technology of Polymers,2000(7):2379-2390. |
| [5] | 何轶,周皓,吴抗震,朱荣林,叶匀分.聚一氟对二甲苯的合成及膜性能研究[J].复旦学报(自然科学版),2004(04):668-671. |
| [6] | 陈曦,吴念曾,邵力为.C型聚对二甲苯狗动脉植入--血液相容性初步研究[J].中国生物医学工程学报,2000(02):206-212. |
| [7] | 陈曦.聚对二甲苯在电子领域中应用的新进展[J].电子工艺技术,2002(04):146-148. |
| [8] | 王艳明.派拉纶成膜技术在档案保护中的应用研究[J].档案学研究,1997(04):63-63,17. |
| [9] | 陈曦.聚对二甲苯在档案,图书加固保护中的应用[J].江苏化工,1997(01):42. |
| [10] | 张占文,李波,王朝阳,余斌,林波.气相沉积法制备聚对二甲苯薄膜[J].材料导报,2003(06):86-87,83. |
| [11] | Bernard Ratier;Yong Seok Jeong;Andre Moliton .Vapor deposition polymerization and reactive ion beam etching of poly(p-xylylene) films for waveguide applications[J].Optical materials,1999(2/3):229-233. |
| [12] | 李小龙,褚明福,帅茂兵,廖俊生.聚对二甲苯膜老化的研究进展[J].材料导报,2006(05):54-58. |
| [13] | 王锡胜,曾家权,李强.低密度氢（氘）化锂微靶制备工艺[J].原子能科学技术,2002(04):316-320. |
| [14] | 石耀刚,杨光成,张长生,王建华.新型涂层聚氯代对二甲苯的性能及其应用研究[J].涂料工业,2006(07):1-3. |
| [15] | 胡国贞,陈梦雪,肖湘竹.薄膜涂层材料--聚对二甲苯[J].成都教育学院学报,2005(01):43-44. |
| [16] | 石红.Parylene真空涂覆新工艺研究[J].航空精密制造技术,2002(01):19-21. |
| [17] | 邵力为;陈曦;徐爱群.NiTi基C型聚对二甲苯膜界面及表面电子能谱分析[J].真空电子技术,1996(04):42. |
| [18] | 张征林;邵力为;陈曦 等.NiTi基C型聚对二甲苯膜等离子体处理的表面能及生物相容性[J].功能材料,1999,30(06):670. |
| [19] | 陈曦;邵力为;顾丽云.等离子处理提高聚对二甲苯对镍钛合金的粘结力[J].化学与黏合,1997(04):191. |
| [20] | 刘枫,沈军,秦仁喜,吴广明,周斌,肖轶群,吴兆丰.聚对二甲苯 /SiO2复合薄膜的制备及光学性能研究[J].功能材料与器件学报,2005(01):38-42. |
| [21] | Granttan D W;Bilz M .The thermal aging of parylene and the effect of antioxidant[J].Studies in Conservation,1991,36:44. |
| [22] | Nowlin T E;Smith D F et al.Thermal oxidative stability of poly-p-xylylenes[J].Polymer Science part A:Polymer Chemistry,1980,18:2103. |
| [23] | Baker T E;Fix G L;Judge J S .Modified poly-paraxylylene coatings and films with improved oxidation resistance[J].Journal of the Electrochemical Society,1980,127:1851. |
| [24] | Lee S M.‘Xyly]ene polymers' in kirk othmer encyclopedia of chemical technology[M].John Wiley and Sons,Inc,1997:744. |
| [25] | Beach W F;Lee C;Bassett D R.Xylylene polymers[A].New York:wiley,1989:195. |
| [26] | C. Y. Shih;T. A. Harder;Y. C. Tai .Yield strength of thin-film parylene-C[J].Microsystem technologies,2004(5):407-411. |
| [27] | Bera M.;Gandon C.;Gardette JL.;Rivaton A. .Photooxidation of poly(para-xylylene)[J].European Polymer Journal,2000(9):1753-1764. |
| [28] | Bera M.;Gandon C.;Gardette JL.;Rivaton A. .Comparison of the photodegradation of parylene C and parylene N[J].European Polymer Journal,2000(9):1765-1777. |
| [29] | 刘枫,沈军,秦仁喜,吴广明,肖轶群,吴兆丰.聚对二甲苯/SiO2薄膜应用于KDP晶体增透保护膜的制备研究[J].材料导报,2005(01):109-111. |
| [30] | Pruden KG.;Sinclair K.;Beaudoin S. .Characterization of parylene-N and parylene-C photooxidation[J].Journal of Polymer Science, Part A. Polymer Chemistry,2003(10):1486-1496. |
| [31] | Pruden KG;Beaudoin SP .Model for the photooxidation of parylenes[J].Journal of Polymer Science, Part A. Polymer Chemistry,2004(11):2666-2677. |
| [32] | Pauwels J;Gestel J V;Vandecasteele C .Irradiation test of thin substrate materials for nuclear targets[J].Nuclear Instruments and Methods in Physics Research,1985,A236:65. |
| [33] | Fortin J B;Lu T M .Ultraviolet radiation induced degradation of poly-para-xylylene(parylene) the films[J].Thin Solid Films,2001,397:223. |
| [34] | Akihiko Tanioka;Noriaki Fukushima;Koichi Hasegawa et al.Permeation of gases across the poly(chloro-p-xylylene) Membrane[J].Journal of Applied Polymer Science,1994,54(02):219. |
| [35] | Hubbell W H et al.Transient and steady-state water vapor permeation through polym films[J].Polym Phys Ed,1975,13(03):493. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%