利用飞秒激光切割结合微细电阻滑焊制备三维金属微双联直齿轮模腔:在厚度为20 μm的0Cr18Ni9不锈钢箔上,在230mW的飞秒激光功率、50 μm/s的切割速度和1.5μm的切割补偿量下获得二维微结构;之后在0.22V的焊接电压,20N的焊接力和10ms的放电时间下,利用微细电阻滑焊对多层二维微结构进行热扩散焊接叠加拟合而成具有曲面特征的微型腔.将平均粒径100μm的乙烯-醋酸乙烯共聚物(EVA)塑料粉末充填入微双联齿轮型腔,在超声波塑料焊接机上设定不同的工艺参数进行成型实验表明,焊接压强为0.2MPa,焊接时间为2.5s,保压时间为0.2s,熔体能快速填充模腔,得到表现形状复制率较好的微塑件.
参考文献
[1] | Yoshihiro Hirata .LIGA process - micromachining technique using synchrotron radiation lithography - and some industrial applications[J].Nuclear Instruments and Methods in Physics Research, Section B. Beam Interactions with Materials and Atoms,2003(0):21-26. |
[2] | F. Laermer;A. Urban .Challenges, developments and applications of silicon deep reactive ion etching[J].Microelectronic engineering,2003(1):349-355. |
[3] | Dongkeon Lee;Harutaka Mekaru;Hiroshi Hiroshima;Sohei Matsumoto;Toshiro Itoh;Masaharu Takahashi;Ryutaro Maeda .3D UV-microreplication using cylindrical PDMS mold[J].Microsystem technologies,2010(8/9):1399-1411. |
[4] | 张志豪,刘新华,谢建新.Zr基非晶合金精密直齿轮超塑性成形试验研究[J].机械工程学报,2005(03):151-154. |
[5] | 郭晓琳,王春举,周健,单德彬,郭斌.Zr基块体非晶合金的微塑性成形性能[J].中国有色金属学报,2006(07):1190-1195. |
[6] | Walter Michaeli;Thomas Kamps;Christian Hopmann .Manufacturing of polymer micro parts by ultrasonic plasticization and direct injection[J].Microsystem technologies,2011(2):243-249. |
[7] | 徐斌,伍晓宇,凌世全,吴世云,罗烽,杜晨林,孙秀泉.飞秒激光切割与微细电阻滑焊组合制备三维金属微结构[J].光学精密工程,2012(08):1811-1823. |
[8] | Truckenmuller R;Ahrens R;Cheng Y;Fischer G;Saile V .An ultrasonic welding based process for building up a new class of inert fluidic microsensors and -actuators from polymers[J].Sensors and Actuators, A. Physical,2006(1):385-392. |
[9] | 胡建良,蒋炳炎,李俊,林名润,王仁全.聚合物超声波熔融塑化实验研究[J].中南大学学报(自然科学版),2010(04):1369-1373. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分:
-
10%
-
20%
-
30%
-
40%
-
50%