通过阐述XPS测试原理及工作特点,讨论其在材料表面研究中的具体应用.通过光电子谱峰位置、形状和强度,可以分析元素价态、含量.角分辨XPS可以检测超薄样品表面的化学状态,成像XPS可以显示样品表面的元素和价态分布,从而进行微区分析.利用氩离子刻蚀进行深度剖析,可以研究样品化学状态随深度的变化关系.
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