采用磁控溅射方法在p-Si(100)衬底上制备了VO2和择优取向的V6O13混合相成分的薄膜.利用X射线衍射(XRD)分析、原子力显微镜(AFM)、傅立叶红外光谱(FT-IR)分析及四探针测试方法,研究了薄膜的相成分和红外吸收特性,并测试分析了薄膜的电学热稳定性.研究结果表明,通过这种方法制备的氧化钒薄膜具有较低的电阻率和较高的电阻温度系数(TCR),并且具有良好的热稳定性,可以作为微测辐射热计的热敏材料.
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