采用超声喷雾热分解法,室温下在玻璃衬底上沉积了N-Al共掺杂的P型ZnO薄膜.采用XRD和SEM测试手段对薄膜进行了晶体结构和表面形貌的表征,结果表明所制备的薄膜为六角纤锌矿结构的ZnO薄膜,表面均匀,结构致密,具有强烈的呈c轴垂直于衬底的(002)择优取向.对薄膜进行了电学测试和光致发光性能测试,并对薄膜的光致发光性能进行了研究.
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