介绍了一种高透光、电阻小，可用于触摸面板大型化的透明导电性薄膜的制造工艺，即在 PET(聚对苯二甲酸乙二酯)薄膜上形成肉眼不可见的铜网。其工艺流程主要包括低温等离子体表面清洗，磁控溅射Ni-Cr过渡层及Cu植晶层，硫酸盐镀铜层，光刻。所得铜布线薄膜的性能超过了一般ITO(氧化铟锡)膜的性能。
A method for producing a transparent and conductive film with high light transmission and low resistance used in large-size touch panel was introduced. Copper mesh which is invisible to the eyes is formed on a PET thin film by the following steps:(1) cleaning the surface with low-temperature plasma;(2) magnetron sputtering with Ni-Cr intermediate layer and Cu seed layer; (3) electroplating Cu in a sulfate bath;and (4) photolithography. The copper wiring film obtained has superior performance than a common ITO film.
参考文献
| [1] | 中谷健司 .如何利用廉价的铜布线实现大尺寸触摸面板[EB/OL].http://www.elecfans.com/tekan/201310_touch.html,2013-11-15. |
| [2] | 河合基伸 .松下成功试制支持70英寸触摸面板的铜布线薄膜[EB/OL].ht ps:/china.nikkeibp.com.cn/news/flat/66737-20130705.html,2013-07-08. |
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