EFFECT OF HEAT TREATMENTS ON THE MICROSTRUCTURE AND TRANSFORMATION CHARACTERISTICS OF TiNiPd SHAPE MEMORY ALLOY THIN FILMS

金属学报(英文版), 2005, 18(6): 707-713.

^1, , ^2, , ^3, , ^4, , ^5,

1.National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, Shanghai 200030, China

2.National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, Shanghai 200030, China

3.National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, Shanghai 200030, China

4.School of Material Science and Engineering, Shanghai Jiaotong University, Shanghai 200030, China

5.School of Material Science and Engineering, Shanghai Jiaotong University, Shanghai 200030, China

基金项目: 上海市科委资助项目(02DJ14042) the Key Project of Chinese Ministry of Education(0307)

EFFECT OF HEAT TREATMENTS ON THE MICROSTRUCTURE AND TRANSFORMATION CHARACTERISTICS OF TiNiPd SHAPE MEMORY ALLOY THIN FILMS

Keywords： Ti-Ni-Pd thin films

Microstructure and phase transformation behaviors of the film annealed at different temperatures were studied by X-ray diffractometry (XRD), transmission electron microscopy and differential scanning calorimeter (DSC). Also tensile tests were examined. For increasing annealed temperature, multiple phase transformations, transformations via a B19-phase or direct martensite/austenite transformtion are observed. The TiNiPd thin film annealed at 750℃ had relatively uniform martensite/austenite transformtion and shape memory effect. Martensite/austenite transformtion was also found in strain-temperature curves. Subsequent annealing at 450℃ had minor effect on transformation temperatures of Ti-Ni-Pd thin films but resulted in more uniform transformation and improved shape memory effect.

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EFFECT OF HEAT TREATMENTS ON THE MICROSTRUCTURE AND TRANSFORMATION CHARACTERISTICS OF TiNiPd SHAPE MEMORY ALLOY THIN FILMS

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