常用的分子束外延、粒子束沉积法难以获得均匀、致密性好的单一相β-FeSi2薄膜,利用脉冲激光沉积及热退火处理法在P型Si(100)基片上制备了均匀的单一相β-FeSi2薄膜.利用X射线衍射仪、扫描电镜、原子力显微镜及红外光谱仪研究了靶基距对β-FeSi2薄膜的结构、组分、结晶质量、表面形貌及光吸收特性的影响.结果表明:随着靶基距的增加,薄膜的晶化程度先变差后增强再变差,晶粒尺寸先减小后增大再减小,颗粒分布均匀性先变好后变差;表面粗糙度先减小后增大;靶基距为40 mm时,β-FeSi2薄膜的结晶度较高,颗粒大小均匀、趋于球形化,薄膜致密性较好,粗糙度较低,对红外光的吸收较好.
参考文献
| [1] | 闫万珺,周士芸,桂放,邹世乾.β-FeSi2的结构、光电特性及应用[J].安顺学院学报,2009(01):90-93. |
| [2] | T. Suemasu;K. Takakura;Cheng Li;Y. Ozawa;Y. Kumagai;F. Hasegawa .Epitaxial growth of semiconducting β-FeSi_2 and its application to light-emitting diodes[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2004(1):209-218. |
| [3] | Teruhisa Ootsuka;Zhengxin Liu;Masato Osamura;Yasuhiro Fukuzawa;Naotaka Otogawa;Yasuhiko Nakayama;Hisao Tanoue;Yunosuke Makita .β-FeSi_2 based metal-insulator-semiconductor devices formed by sputtering for optoelectronic applications[J].Materials Science & Engineering, B. Solid-State Materials for Advanced Technology,2005(0):449-452. |
| [4] | 马道京,张晋敏,王衍,朱培强,陈站,谢泉.环境友好半导体β-FeSi2薄膜的制备方法研究[J].纳米科技,2009(05):35-39. |
| [5] | S.Y. Ji;G.M. Lalev;J.F. Wang;J.W. Lim;J.H. Yoo;D. Shindo;M. Isshiki .MBE growth of β-FeSi_2 epitaxial film on hydrogen terminated Si (111) substrate[J].Journal of Crystal Growth,2005(1/2):284-294. |
| [6] | 王成伟,马军满,陈建彪.靶衬间距对脉冲激光沉积薄膜均匀性的影响[J].西北师范大学学报(自然科学版),2010(03):39-43. |
| [7] | Daoren Gong;Dongsheng Li;Zhizhong Yuan;Minghua Wang;Deren Yang .Optical Properties Of Single-phase β-fesi_2 Films Fabricated By Electron Beam Evaporation[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2008(15):4875-4878. |
| [8] | Vouroutzis N;Zorba T T;Dimitriadis C A et al.Growth of β-FeSi2 particles on silicon by reactive deposition epitaxy[J].Journal of Alloys and Compounds,2008,448(1/2):202-205. |
| [9] | 周幼华,陈娴娟,乔燕,陆培祥,郑启光.飞秒脉冲激光沉积法的动力学过程实验研究[J].江汉大学学报（自然科学版）,2007(04):33-36,62. |
| [10] | Effect of target-substrate separation on HgCdTe films formed by pulsed laser deposition[J].Journal of Crystal Growth,2010(7):914. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%