一种低温共烧AlN陶瓷基片的排胶技术

无机材料学报, 1998, 13(3): 396-400.

一种低温共烧AlN陶瓷基片的排胶技术

吴音 , 周和平 , 刘耀诚 , 缪卫国

State Key Laboratory of New Ceramics and fine Precessing

Dept. of Materials Science and Engineering

Tsinghua University Beijing 100084 China

关键词： AlN陶瓷 , low temperature cofire , binder burn-out , residual carbon

A Technique of Burn-out for Low Temperature Cofired AlN Multilayer Substrates

WU Yin , ZHOU He-Ping , LIU Yan-Cheng , MIAO Wei-Guo

Keywords： aluminium nitride , 低温共烧 , 排胶 , 残余碳

介绍一种由高热导率AlN陶瓷和金属W共烧制备低温AlN陶瓷基片的排胶技术．研究了排胶过程中残余碳对AlN陶瓷基片相组成、烧结特性和微观结构的影响．结果表明：两步排胶法可以较好地解决W氧化及AlN陶瓷颗粒表面吸附残余碳的问题．

A technique of burn-out for low temperature cofired AlN multilayer substrates was introduced,which consist of high thermal conductivity AlN ceramics and metal W. The effect of the evolutionof carbon during burn-out on AlN sintering characteristics and microstructure was studied. Theresults showed that two-step burn-out process may solve the contradiction between W oxidationand residual carbon.

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