利用磁控溅射法在不同流量的液氮低温冷却的条件下在ITO玻璃上制备WO3、LiTaO3、NiOx、ITO薄膜,5层薄膜组成ITO/WO3/LiTaO3/NiOx/ITO全固态电致变色器件.采用XRD、SEM、可见光分光光度计等测试手段进行对比分析.结果发现:低温制备的WO3薄膜为非晶态结构,在可见光范围内漂白态和着色态的平均透射率差△T可以达到70%以上.LiTaO3薄膜表面的颗粒度比较小,结构致密,其厚度对整个器件的光学性能有一定影响,在可见光范围内平均透射率达到95%.在低温条件下制备的NiOx薄膜比常温沉积的薄膜会提供更多的Ni2+离子参与变色反应.该器件显示出较好的电致变色特性.
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