采用纳米压痕法测定了涂覆不同厚度溶胶-凝胶TiO2纳米薄膜的玻璃基体表面的力学性能,讨论了薄膜厚度对膜-基复合系统的硬度和弹性模量的影响.结果表明:膜-基复合系统的硬度和弹性模量与TiO2薄膜的厚度无关.同时采用有限元法对压痕过程进行了数值模拟,通过与实验及文献结果相比较证明了有限元模拟的有效性.
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