采用反应磁控溅射方法在高速钢基体上制备了CNx薄膜,通过改变氮气和氩气的流量比来调整CNx薄膜中的氮含量,并采用XRD、HR-TEM、SEM、FTIR和显微硬度计等对薄膜的结构及其在300,400,500,600℃下的高温抗氧化性能进行了表征.结果表明:CNx薄膜在400℃以下具有较好的抗氧化性能,当氧化温度达到500℃后薄膜会发生严重氧化和分解;CNx薄膜中氮含量的增加有利于改善薄膜的高温抗氧化性能.
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