以0.2 mol/L Sr(OH)2+0.2 mol/L NaOH溶液为电解液,工艺参数分别设置为电流密度2 A/cm2、电流频率100 Hz、反应时间30 min及占空比85％,采用微弧氧化法在工业纯Ti板(99.5％)表面原位生长SrTiO3薄膜,并对薄膜的物相组成,元素分布情况及薄膜介电、铁电性能进行表征.结果表明:所得薄膜主要由四方相SrTiO3构成.薄膜介电常数随频率升高而降低,其在1 kHz条件下的介电常数为317.薄膜中除Sr、Ti、O元素外,还存在Na元素,且Na元素在薄膜与基体结合处出现富集,元素分布的微小波动可能是由微弧氧化孔洞造成.
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