应用于蓝牙技术发展的LTCC—

功能材料, 2002, 33(5): 518-523.

应用于蓝牙技术发展的LTCC——AlN多层布线工艺

1.复旦大学材料科学系,上海,200433

2.复旦大学材料科学系,上海,200433

3.复旦大学材料科学系,上海,200433

4.复旦大学材料科学系,上海,200433

5.复旦大学材料科学系,上海,200433

6.复旦大学材料科学系,上海,200433

基金项目: 国家自然科学基金(69836030)

关键词： AlN , LTCC , 蓝牙

现代IT产业的发展催生了蓝牙技术的发展.而蓝牙技术的发展迫切需要发展高性能三维功能衬底技术.AlN陶瓷具有优良的综合性能.研究了AIN流延坯和Ag导体浆料的低温共烧技术,比较了在AlN成瓷基板上的各种金属化工艺.

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