SiNx的结构和性能都会随x值发生显著变化,尤其是薄膜的发光性质.同时,在不同条件下制备的SiNx薄膜中都观察到了可见光致发光现象,研究者提出了相应的机制予以解释.总结了近十年来关于SiNx薄膜的光致发光研究进展,评述了其各种发光机制.
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