采用溶胶-凝胶法合成了Bi4Ti3O12(简称BTO)和La掺杂Bi4-xLaxTo3O12(简称BLT)薄膜,通过TG-DTA、XRD、AFM等技术手段研究了薄膜的制备工艺、相组成和微观形貌.研究表明:用乙醇铋(自制)、钛酸正丁酯和硝酸镧作为原料,乙二醇、冰乙酸作为溶剂,在Pt(111)/Ti/SiO2/Si结构的基片上,Sol-Gel法旋涂的薄膜经60℃干燥,反复涂覆5次,60℃干燥,300℃除有机物,550℃快速热处理10 min可得到钙钛矿相BTO薄膜.600℃快速热处理的薄膜比随炉冷却的薄膜均匀致密,随着La含量增加薄膜晶粒细化.
参考文献
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