SmCo合金具有极高的单轴磁晶各向异性,成为未来高密度磁记录介质的候选材料之一.本文采用磁控溅射方法,在玻璃基片上制备了Cr(100nm)/SmCo(50 nm)/Cr(20 nm)结构的Smco薄膜,SmCo层中Sm含量为35%(原子分数).利用综合物性测试系统(PPMS)和X射线衍射(XRD)对薄膜的磁性能和晶体学结构进行了测试.结果表明,通过550℃退火20 min可以获得很好的硬磁性能,矫顽力R.达到了3183kA·m-1,XRD结果表明薄膜中同时存在磁性相SmCo5和非磁性相SmCo2等.高Sm古量的SmCo薄膜在退火温度为450℃时开始晶化,退火温度达到550℃时,晶化进行的比较完全.
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