采用Sol-gel法制备梯度复合热释电薄膜

材料导报, 2006, 20(3): 141-143.

1.湖北大学化学与材料学院,武汉,430062

2.湖北大学化学与材料学院,武汉,430062

3.湖北大学化学与材料学院,武汉,430062

4.湖北大学化学与材料学院,武汉,430062

基金项目: 中国科学院资助项目(59972008)

Thin Films of Gradient Multicomposition Composite KTa1-xNbxO3 Prepared by Sol-gel Process

以TaCl5和NbCl5为原料制备了乙醇钽和乙醇铌,对溶胶-凝胶法制备KTa1-xNbxO3薄膜的工艺过程、影响因素进行了研究,提出了优化的制备工艺,采用溶胶-凝胶法在Pt/Ti/SiO2/Si衬底上制备了组分梯度复合KTa1-xNbxO3热释电薄膜.

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