研究了用磁控溅射系统来制备氧化钒薄膜,通过优化工艺条件制备出可用作锂离子微电池阴极膜的非晶态五氧化二钒(α-V2O5)薄膜.并使用X射线衍射(XRD)与X射线光电子谱(XPS)来表征薄膜的晶向及化学组分.结果表明通过调节氧气以及氩气的流量、基片的温度和溅射功率,可以制备出高纯度的α-V2O5薄膜.而且,半电池体系V2O5/LiPF6/Li被构造用于表征在锂电池中作为阴极膜的五氧化二钒(α-V2O5)的电学性质.在此电池系统经过10个循环放电后,薄膜放电电容趋于稳定值.
The vanadium oxide thin films prepared by RF magnetron sputtering system were investigated in an attempt to prepare amorphous vanadium pentoxide (α-V2O5) as the cathode film in lithium micro-battery.The film's phase and composition were characterized by X-ray diffraction (XRD) and X-ray photo spectroscopy (XPS).It is found that high-purity α-V2O5 thin films can be prepared by adjusting flux ratio of O2 and Ar,substrate temperature and sputtering power.Furthermore,the electrochemical properties of α-V2O5 as the cathode film in lithium battery were characterized by configuring the half cell V2O5/LiPF6/Li. After 10 discharge cycles of the cell, the discharge capacity reaches to a stable level.
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