聚焦离子束系统是微细加工和分析的主要技术之一,是一个完美的微米/纳米技术研究平台.简述了聚焦离子束系统的组成和主要功能,着重介绍了近年来该技术在离子束刻蚀、反应离子束刻蚀、离子束辅助沉积、离子注入、微区分析、掺杂和成像以及无掩膜曝光等微米/纳米加工领域的应用,并对未来的发展前景进行了简要分析.
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