Effect of increasing content of Ti on the crystalline-to-amorphous transition in alloy film of stainless steel 321 plus Ti synthesized by high rate magnetron sputtering deposition is reported.X-ray diffraction analysis revealed that the microstructure of film was sequently changed from α-Fe,α-Fe-X-phase,microcrystalline+amorphous into amorphous with increasing content of Ti fiom 0—3,3—10,10—18 and 18—30 wt-% respectively.
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