用燃烧火焰法在TC4 Ti 合金和单晶Si(001)面上沉积了金刚石薄膜。对合成的膜进行了扫描电镜、激光喇曼光谱分析。结果表明,金刚石薄膜的结构和形貌强烈取决于沉积温度、O_2/C_2H_2流量比等工艺参数。研究了衬底表面预处理对金刚石薄膜形核及长大的影响,并对表面预处理影响形核的原因进行了初步探讨。
Diamond films were synthesized on TC4 Ti alloy and Si(001)substrates bycombustion flame method in the atmosphere.The films obtained were characterized by scanningelectron microscopy and laser Raman spectroscopy.The results indicated that the structure and
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| [8] | Muranaka Yet al.J Appl Phys,1990 |
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