采用等离子体增强化学气相沉积技术,以C2H2、H2和N2为反应气体,制备出碳纳米管薄膜.利用扫描电镜和拉曼光谱仪对其进行表征.结果表明:氢气流量对碳纳米管薄膜的生长起着重要作用,获得分布均匀、密度适中、杂质缺陷少的碳纳米管的最佳氢气流量为30 sccm.
Carbon nanotubes are obtained with acetylene,hydrogen and nitrogen as reactant gases by a technology of plasma enhanced chemical vapor deposition.They was characterized by scanning electron microscopy (SEM) and Raman spectrometer.The results show that hydrogen plays an important role in the growth of carbon nanotubes and the optimum hydrogen flow for the carbon nanotubes with uniform distribution,moderate density,less impurity and defect is 30sccm.
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