采用脉冲辉光放电等离子体气相沉积法在316不锈钢表面沉积膜层较厚的类金刚石膜层。利用拉曼光谱仪（Raman）、X射线光电子能谱仪（XPS）、傅里叶变换红外光谱仪（FT-IR）、光学显微镜、显微硬度计和摩擦磨损实验机分别对膜层组成和微观结构及机械性能进行了表征。研究发现,通过脉冲辉光放电等离子体气相沉积法,在316不锈钢表面制备的类金刚石膜层光滑致密;Raman分析得到的ID/IG和IT/IG比值分别为0.72和0.22;FT-IR分析可知膜层含有较多的CHx组成的sp3键;摩擦磨损试验得到膜层的摩擦系数低至0.100,XPS分析膜层sp3含量高达60.7%和光学显微镜测量膜层的厚度达到7mm。由此可知沉积类金刚石膜层后,可以显著地改善316不锈钢表面的机械性能。
The thick diamondlike carbon （DLC） films were deposited on 316 stainless steel by pulsed glow dis charge plasma vapor deposition （PGDVD） and cathodic arc discharge method （CAD）. The composition ,micro structure and mechanical property of the films were investigated by Raman spectroscopy, Xray photoelectron spectroscopy （XPS）,optical microscope, microscopic hardness meter and friction wear testing machine. It was found that the DLC films were improved owing to the compact structure and smooth surface. The G peak and D peak showed a move to a higher wave,the ID/IG and IT/IG intensity rate were 0. 72 and 0.22, respectively. FT IR analysis showed that the film contains more CHx key component of spa ; the friction coefficient reached 0. 100 and the spa content was 60.7X and the thickness was 7mm in film. The mechanical hardness and the frictional surfaces trail of the DLC film were also meaasured
参考文献
| [1] | Robertson J .[J].Materials Science and Engineering,2002,R37:129-281. |
| [2] | Carapeto, A.P.;Serro, A.P.;Nunes, B.M.F.;Martins, M.C.L.;Todorovic, S.;Duarte, M.T.;André, V.;Cola?o, R.;Saramago, B. .Characterization of two DLC coatings for joint prosthesis: The role of albumin on the tribological behavior[J].Surface & Coatings Technology,2010(21/22):3451-3458. |
| [3] | Matti V .[J].Diamond and Related Materials,2001,101:53-107. |
| [4] | 白越,黄敦新,曹萍,高庆嘉.类金刚石薄膜在于摩擦、油和脂润滑条件下的摩擦学性能分析[J].真空科学与技术学报,2011(05):555-559. |
| [5] | Hauert R .[J].Diamond and Related Materials,2003,12:583. |
| [6] | Kelly P J;Arnell P D .[J].Vacuum,2000,56:159-172. |
| [7] | Tiainen V M .[J].Diamond and Related Materials,2001,10:153-160. |
| [8] | Fedosenko G .[J].Diamond and Related Materials,2002,11:1047-1052. |
| [9] | Ferrari A C;Robertson J .[J].Physical Review B:Condensed Matter,2001,64:075414. |
| [10] | 李河清,马峰,陈秋龙.影响薄膜（涂层）硬度测试的因素[J].材料保护,2001(09):45-47. |
| [11] | Jonsson B;Hogmark S .Hardness measureements of thin films[J].Thin Solid Films,1984,114(03):257-269. |
| [12] | Bowden F P;Tabor D.The friction and lubrication of solids(Part I )[M].Oxford:clarendon Press,1950:230. |
| [13] | Bowden F P;Tabor D.The friction and lubrication of solids(Part Ⅱ)[M].Oxford:clarendon Press,1964:10. |
- 下载量()
- 访问量()
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%