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采用带有半封闭式气体循环系统的100千瓦级直流电弧等离子体喷射CVD设备制备三组不同质量的金刚石膜,通过532 nm激光激发金刚石膜的拉曼光谱时,除1332 cm-1金刚石一阶拉曼峰外还出现了1420 cm-1宽峰,本文针对这一峰位的由来及分布进行研究.结果表明,增加或降低拉曼激发波长该峰为都不复存在,不符合材料的拉曼特征频移与激发波长无关这一原则,证明其并非本征拉曼峰;采用488 nm激发和514 nm激发时拉曼光谱分别出现了与1420 cm-1峰型一致的3125 cm-1和2060 cm-1峰,将拉曼频移转换为波长后发现,三个峰位都对应于波长575 nm(2.156eV);575 nm为金刚石膜荧光光谱中常见峰位,对应于氮杂质相关的[N-V]0中心,这表明含氮杂质金刚石膜采用532nm激发时产生的1420 cm-1峰是[N-V]0相关的氮杂质引起的荧光峰;采用532 nm对金刚石膜形核面和生长面的拉曼面扫描结果表明,[N-V]0相关的氮杂质存在于金刚石膜表面晶粒与晶界各处,并存在一定程度的偏聚.

参考文献

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