采用射频反应磁控溅射工艺,以纯钽为靶材,在WO3/ITO/Glass基材上制备TaOx薄膜,研究氧含量、溅射功率等制备工艺参数对TaOx薄膜性能的影响.用三位电极法和透射光谱等方法检测薄膜的离子导电性能,结果表明:所得的TaOx薄膜主要为非晶态,在一定范围内,在较低的溅射功率和较低的氧含量实验条件下制备的TaOx薄膜具有较好的离子导电性能.
参考文献
| [1] | 张旭苹.用作电致变色器件的LiNbO3离子导体薄膜的研究[J].光学学报,1998(06):803. |
| [2] | Lampert C M .Electrochemical lithium insertion in Sol-gel deposited LiNbO3 films[J].Solar Energy Materials and Solar Cells,1995,39(02):367. |
| [3] | Aliev A E;Shin H W .Image diffusion and cross-talk in passive matrix electrochromie displays[J].Journal of Displays,2002,23(05):239. |
| [4] | Kumar R V .Application of rare earth containing solid stae ionic conductors in electrolytes[J].Journal of Alloys and Compounds,1997,250:501. |
| [5] | Anna-Lena Larsson;Gunnar A Niklasson .Infrared emittance modulation of all-thin-film electrochromie devices[J].Journal of Materials Letters,2004,58:2517. |
| [6] | 孙雷,史月艳.射频溅射沉积TaOx薄膜离子导体性能[J].太阳能学报,1998(01):0. |
| [7] | Klingler M;Chu W F;Weppner W .Three-layer electroromic system[J].Journal of Solar Energy Materials and Solar Cells,1995,39:257. |
| [8] | Jeffrey S. Hale;John A. Woollam .Prospects for IR emissivity control using electrochromic structures[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1999(1/2):174-180. |
| [9] | 孙雷;吴健平 .电致变色器件透明电极和离子导体层的研究[J].清华大学学报(自然科学版),1997,8(01):102. |
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