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利用液相电沉积技术制备了含氢类金刚石薄膜(DLC);讨论了应用电位和沉积碳源对沉积过程和薄膜结构的影响;结果表明有高介电常数、低粘度、分子中甲基基团直接与极性基团键合的有机液体是合适的沉积碳源;通过增加沉积电位将有利于薄膜中sp碳的生长;最后,作者提出了液相沉积类金刚石薄膜的反应机理-极化-反应机制,在电场的作用下,有机分子被极化并在电极表面反应生成DLC薄膜和其他产物.

Hydrogenated diamond-like carbon (DLC) films were prepared by using a liquid phase electrodeposition technique. The effect of
applied potential and carbon sources on the deposition process and film structures were studied. The results show that the organic liquids with high dielectric constants, small
viscosities and the methyl group bonding to the polar group are appropriate carbon sources. The increasing potential can improve the formation of sp3 carbon during the deposition
process. In a high electric field, organic molecules are polarized and react on the surface of the electrode, turning into DLC and other products. The authors believed that the reaction
follows a polarization-reaction mechanism.

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