本文首先探索热蒸发法制备高质量WO3薄膜的工艺参数,分别从基片类型,基片温度和蒸发速率三方面讨论和分析成膜的质量,获得在ITO玻璃基片最佳的蒸镀条件为蒸发电流为110 A,基片温度为250℃.其次,应用高质量WO3薄膜于全固态电致变色器件结构中,获得了良好的变色性能,实现逐段控制的数码显示效果.研究结果表明高质量WO3薄膜在电致变色器件,特别是双面显示器件方面具有潜在的应用前景.
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