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对粉粒受力情况进行了分析,建立了速度方程,并对硅-锗合金粉料进行了计算。为了提高沉降过程中的提纯效果,着重对增加沉降时间进行研究,提出了一些措施。

The kinematics of particulate drop in plasma is studied, and thevelocity equations of particulate drop are provided. The experimental study of kinematics of SiGe alloy particulates has been carried out. The results indicate that for increasing the purity effect, the drop time of the particula tes must increase, and the particulate velocity must decrease. This study could be applied to fabrication of high purity materials by cold plasma.

参考文献

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