用Ｘ射线衍射、透射电镜、Ｒａｍａｎ光谱、Ｘ射线光电子谱等测量方法研究了用对向靶溅射法制备的Ｃｏ／Ｃ多层膜的结构热稳定性．退火Ｃｏ／Ｃ多层膜的结构变化包括周期膨胀、非晶Ｃｏ层结晶、掠入射反射率变化以及化合物的形成．４００℃退火，周期膨胀主要是由于非晶碳层的石墨化．Ｃｏ／Ｃ系统的相分离造成掠入射反射率增强，可解释为Ｃｏ／Ｃ系统的正的混合焓．５００℃退火，Ｃｏ层的结晶和集聚导致了周期的异常膨胀和反射率的降低．此时界面处形成了少量的碳化物．
Thermal behaviours of Co/C multilayers prepared by a dual-facing-target sputtering system were studied by using X-ray diffraction,transmission electron microscopy,Raman spectroscopy,and X-ray photoelectron spectroscopy.The changes observed in the annealed Co/C multilayers include an expansion of modulation period,crystallization in the Co layers,changes of reflectivity at grazing incidence and Co-C compound formation.Below annealing temperature of 400℃,the expansion in modulation period is mainly due to the graphitization of the amorphous carbon layers,and the enhancement of the reflectance is dominantly caused by Co-C separation that is interpreted as positive enthalpy of Co-C mixing.By 500℃,the crystallization and agglomeration of Co layers induce an enormous period expansion and a serious decrease in reflectivity.A small amount of carbide is found to form at this temperature as occurred in some other annealed metal-carbon multilayer systems.
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