基于铝诱导非晶硅薄膜固相晶化方法,利用直流磁控溅射离子镀技术制备了Al/ Si…Al/ Si/ glass周期性结构的薄膜.采用真空退火炉对Al/ Si多层薄膜进行了500℃退火实验,通过透射电子显微镜(TEM)分析了不同退火时间下Al/ Si多层薄膜截面形貌的变化规律,并结合扩散过程探讨了退火时间对铝诱导非晶硅薄膜晶化过程的影响机理.研究结果表明:在铝诱导非晶硅薄膜固相晶化过程中,在退火过程的初期,晶态硅薄膜的生长主要来源于因Al的存在而形成的硅初始品核数量增加的贡献.随退火时间的延长,晶态硅薄膜的生长主要是依靠临界浓度线已推进区域中未参与形核的硅原子扩散至初始品核位置并进行外延生长来实现的.经500℃退火1 h后,Al/ Si薄膜的截面形貌巾出现了沿Si(111)晶面生长的栾品组织.
参考文献
| [1] | P. Plantin;F. Challali;O. Carriot;F. Lainat;M. Ancilotti;G. Gadot;P. Brault .Large area silicon epitaxy using pulsed DC magnetron sputtering deposition[J].Microelectronic engineering,2008(3):636-639. |
| [2] | Reinig P.;Fenske F.;Fuhs W.;Selle B. .Crystalline silicon films grown by pulsed dc magnetron sputtering[J].Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites,2002(Pt.1):128-132. |
| [3] | Shah A.;Meier J.;Vallat-Sauvain E.;Droz C.;Kroll U.;Wyrsch N. Guillet J.;Graf U. .Microcrystalline silicon and 'micromorph' tandem solar cells[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2002(0):179-187. |
| [4] | 张德贤,薛颖,蔡宏琨,陶科,姜元建,赵敬芳,王林申,隋妍萍.柔性衬底非晶硅薄膜太阳电池量子效率的研究[J].人工晶体学报,2009(02):407-410,415. |
| [5] | 张学宇,吴爱民,冯煜东,胡娟,岳红云,闻立时.ECR-PECVD制备n型微晶硅薄膜的研究[J].人工晶体学报,2010(04):852-856. |
| [6] | IKim H;Lee G;Kim D et al.A Study of Polycrystalline Silicon Thin Films as a Seed Layer in Liquid Phase Epitaxy Using Aluminum-induced Crystallization[J].Current Applied Physics,2002,2(02):129-133. |
| [7] | The metal-induced crystallization of poly-Si and the mobility enhancement of thin film transistors fabricated on a glass substrate[J].Microelectronic engineering,2010(11):2163-2167. |
| [8] | I. Gordon;L. Carnel;D. Van Gestel;G. Beaucarne;J. Poortmans .Fabrication and characterization of highly efficient thin-film polycrystalline-silicon solar cells based on aluminium-induced crystallization[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2008(20):6984-6988. |
| [9] | Ekanayake G;Quinn T;Reehal HS .Large-grained poly-silicon thin films by aluminium-induced crystallisation of microcrystalline silicon[J].Journal of Crystal Growth,2006(2):351-358. |
| [10] | Dimova-Malinovska D;Grigorov V;Nikolaeva-Dimitrova A;Angelov O;Peev N .Investigation of aluminium structural properties of poly-Si thin films obtained by induced crystallization in different atmospheres[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2006(1/2):358-361. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%