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利用激光脉冲沉积法(PLD)制备了Na掺杂ZnO∶ Nax薄膜(0≤x≤0.1),并较全面地研究了Na含量对ZnO∶ Nax薄膜结晶质量和光电性能的影响.研究结果表明Na含量低于5%时,ZnO∶ Nax薄膜能够保持良好的c轴择优取向生长.随着Na含量的增加,薄膜由本征n型转变为p型.并且当Na含量为2%时,获得p型性能良好的薄膜:电阻率为53.5Ωcm,迁移率为0.55cm2V-1 s-1,空穴浓度为2.1×1017cm-3.结合XPS测试结果,我们认为p型转变是因为Na掺杂在ZnO中主要形成受主态NaZn.PL测试表明ZnO∶ Na0.02薄膜在377nm处具有良好的室温紫外带边发射.

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