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采用射频磁控溅射技术,在Ge纳米镶嵌薄膜的基础上制备出电致发光器件.器件的结构为半透明Au膜/Ge纳米镶嵌薄膜/P-Si基片.当正向偏压大于6V时,用内眼可以观察到可见的电致发光,但在反向偏压下探测不到光发射.所测电致发光谱中只有一个发光峰,峰位在510nm(2.4eV,绿光),并且随着正向偏压的升高,峰位不发生移动;对于不同温度退火的样品,峰位也保持不变.根据分析结果讨论了可能的电致发光机制.

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