薄层二硫化钼(MoS2)作为一种二维过渡金属硫属化合物(TMDC)具有较好的光学和电学特性,在目前的半导体光电功能器件领域中具有良好的应用前景.本文主要采用一种温和等离子体技术并在以氢气作为先驱气体的环境下对薄层二硫化钼进行处理,研究处理前后以及后续退火后薄层二硫化钼的光学与电学特性的变化.研究表明,氢原子在温和等离子体的作用下会渗入薄层MoS2,从而改变原始的晶格结构并影响MoS2的晶格振动,导致荧光淬灭,同时使薄层MoS2趋于本征或者p型.后续退火会引起极少数MoS2分子与氢原子的重新键合,从而改变其带隙.
As a two-dimensional transition-metal dichalcogenide (TMDC), few-layer molybdenum disulfide (MoS2) possesses excellent optical and electrical properties and thus shows a great prospect in the field of optoelectronic functional devices.In this work, mechanically exfoliated few-layer MoS2 flakes were treated by a novel soft hydrogen plasma followed by post annealing and the resultant variations in both optical and electrical properties were systematically investigated.It has been demonstrated that hydrogen atoms may penetrate into MoS2 lattices with the help of soft hydrogen plasma and consequently change pristine lattice structure as well as lattice vibration, leading to fluorescence quenching and at the same time making n-type few-layer MoS2 become intrinsic or p-type doping.Post annealing after soft hydrogen plasma treatment may induce the bonding of a very few MoS2 molecules with hydrogen atoms, giving rise to the bule shift of optical band gap.
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