综述了超临界流体沉积法(SCFD)在金属及金属氧化物纳米材料制备方面的研究进展,介绍了超临界流体溶解度高、表面张力为零等独特的物理性能,以及可在平坦的、有精细图案的基底表面沉积金属、金属氧化物纳米颗粒或薄膜的技术优势.阐述了超临界流体中纳米颗粒或薄膜的沉积机理,讨论了沉积温度、先驱物浓度、压力、还原剂浓度等因素对沉积速率的影响.展望了超临界流体沉积今后的研究趋势.
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