提出一种新型的可直线运动的压电陶瓷驱动器.驱动器选用圆环形的压电陶瓷(PZT4),其外径10 mm,内径4.5 mm,厚0.8 mm,陶瓷表面均匀分成4个扇形电极区,以"正、正、负、负"沿厚度方向极化.该驱动器定子采用棒板结合式结构,一个中轴的两端分别连接了两个对称的圆形平板,圆板与中轴相互垂直.两片陶瓷分别粘接在定子的两圆形平板外侧,对定子激振形成两圆平板的交替式跨步直线运动.驱动器整体外径12 mm,长度10.6 mm.采用有限元方法对驱动器的运动模态进行了仿真,通过谐响应分析计算了驱动器在X向和Y向的振幅,分析了驱动器的运行原理.实验结果表明:驱动器最佳工作频率在13.15 kHz左右,驱动电压100 Vo-p时驱动器的最高运行速度为34 mm/s.该驱动器在小载荷、高精度精密定位等场合具有很好的实用化前景.
This paper proposes a new type of linear piezoelectric actuator. The ring-shaped piezoelectric ceramics (PZT4) are used in this actuator and their outer diameter is 10 mm, inner diameter 4.5 mm and thickness 0.8 mm. Each ceramic is equally divided into four fan-shaped areas and polarized along thickness direction with "+, +, -, -" type. The stator of the actuator has a structure similar to the disk-pivot,which has a shaft connecting two symmetrical disks together. Two ceramic discs are bonded onto the outboard surface of the stator. Under the resonant mode, the step vibration can be excited by the warping vibration of the ceramics. The outer diameter of the actuator is 12 mm, and the length is 10.6 mm. The vibration modes were analyzed using the finite element method. Through the harmonic analysis, the vibration amplitude of the actuator was calculated and the operation principle was analyzed. The actuator's performance was experimentally tested. Results showed that the working frequency is 13.15 kHz. Under the 100 Vo-p driving voltage, the maximum speed was measured as 34 mm/s, and it has good prospect in the fields of the precision positioning.
参考文献
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