金刚石薄膜由于其独特的物理、化学和电学等特性,使其作为在极具发展潜力的MEMS中一种理想的材料,越来越得到人们的重视.此外近来各种金刚石薄膜的合成和加工方法已不断发展,使金刚石薄膜MEMS已逐步从原理的证明转向了实际的应用.本文简述了金刚石膜在MEMS中应用的技术基础及其在MEMS中应用的最新进展,着重介绍了金刚石喷嘴在生物芯片中的应用;半导体金刚石探针(既可用作隧道扫描显微镜探针又可作为一种抛光表面的微型工具);世界上最微型的金刚石外科手术刀及微型电夹.
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