利用直流磁控溅射法在室温玻璃衬底上制备出了可见光透过率高、电阻率低的掺锆氧化锌(ZnO: Zr)透明导电薄膜.并系统地研究了靶与衬底之间的距离对ZnO: Zr薄膜结构、形貌、光学及电学性能的影响.实验结果表明,靶与衬底之间的距离对ZnO: Zr薄膜的生长速率、结晶质量及电学性能有很大影响,而对其光学性能影响不大.实验制备的ZnO: Zr为六方纤锌矿结构的多晶薄膜,且具有垂直于衬底方向的c轴择优取向.当靶与衬底之间的距离从60 mm减小到50 mm时,薄膜的晶化程度提高、晶粒尺寸增大,薄膜的电阻率减小;然而,当距离继续减小时,薄膜的晶化程度降低、晶粒尺寸减小,薄膜的电阻率增大.当靶与衬底之间的距离为50 mm时,薄膜的电阻率达到最小值4.2×10-4 Ω·cm,其可见光透过率超过95%.实验制备的ZnO: Zr薄膜可以用作薄膜太阳能电池和液晶显示器的透明电极.
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