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分别采用AFM和原子力/扫描探针显微镜(AFM/SPM)在纳米尺度下对碲基复合(Te/TeO2-SiO2)薄膜的表面电势、电容梯度等电学特性进行测量。测试结果表明控制电压为-0.8V,反应时间为200s条件下制备的碲基复合薄膜的表面电势差达到700mV,相对介电常数小于以硅为主要成分的衬底相对介电常数。利用光谱分析,碲基复合薄膜的禁带宽度约为3.14eV。

The surface potential and capacitance gradient were characterized by AFM/SPM in nano-scale.The results showed that the maximum contact potential difference was about 700mV,the relative dielectric constant of tellurium-based composite particles was smaller than the relative dielectric constant of substrate with silicon as the main component when control voltage is-0.8V in reaction time of 200s.The optical band gap was estimated to be 3.14eV by spectrum.

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