采用电沉积方法制备了混合电容器钽基多孔氧化钌阴极涂层材料,探讨了电沉积过程中电沉积液的pH值随电沉积时间的变化关系,研究了电沉积时间对氧化钌沉积质量的影响.用X射线衍射和扫描电镜分别表征了热处理前后的涂层结构及涂层的多孔形貌,用循环伏安法测量了涂层的电容,并研究了热处理温度对电容量大小及其稳定性的影响.结果表明:电沉积的氧化钌为非晶态,涂层为纳米多孔结构;热处理有利于涂层孔隙结构及大小的均匀性,不同温度的热处理使涂层具有不同的电容,经热处理后涂层的电容稳定;经100℃热处理1 h后的多孔氧化钌涂层具有最大的比电容.
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