采用磁控溅射沉积万法在钛锚合金基体上制备有Ti与无Ti的类金刚石(DLC)膜,全方位离子注入(PSlI)技术被用来在膜与基体之间形成过渡层,提高膜基界面的附着力.通过X射线光电子能谱、纳米压痕、摩擦磨损等表征手段比较2种薄膜的化学组成、微结构特征和力学性能.结果表明:掺Ti α-C:H膜是含有TiC纳米晶粒的复合膜结构,其中TiC晶粒的大小约是5 nm,掺Ti α-C:H膜的力学性能得到明显改善,硬度被提高到24 GPa左右,而且结合力也明显得到提高.在大气中对样品进行热处理后,再进行摩擦磨损试验,结果表明 Ti 掺杂改善了α-C:H膜的热稳足性.
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