Ti-B-N coatings were deposited on W18Cr4V high speed steels by using EB-ion plating with different boron contents. The chemical compositions of the coating are Ti, B and N. It was found that Ti, B and N in the coating are homogeneous, but there exists a diffusion zone at the coating/substrate interface on the basis of the results of ion probe microanalysis and Auger electron spectrometry. The boron content of the coating is 3-16 at.% given by nuclear reaction analysis. The ratio of nitrogen to titanium of the coating is about 1 given by electron probe microanalysis. The microhardness (HV) of the coating is 35-45 GPa (load of 0.25 N). The critical load of the coating using the scratch test is 12-14 N. The sliding friction coefficient of the coating on diamond stylus is 0.086-0.097 (load of 8.8 N). X-ray diffraction measurement shows that the coating consists of f.c.c. TiN, simple orthorhombic TiB, cubic BN and simple hexagonal Ti-B-N phases. As expected, the higher the boron content, the higher the content of cubic BN and TiB phases; and the higher the microhardness, the lower the adhesion.
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