以水合三氧化钌(RuCl3·3H2O)和正硅酸乙酯(TEOS)为原料,采用溶胶-热分解法制备了超级电容器用(RuO2/SiO2)·nH2O复合薄膜电极材料.研究了热处理温度及热处理时间对电极材料电学性能的影响.借助CHI660C电化学工作站时薄膜材料的电化学性能进行了测试,采用SEM、XRD、FTIR等检测手段对复合材料的微观形貌、物相结构进行了分析.结果表明,固定水合三氯化钌和正硅酸乙酯的物质的量比为10∶3,当热处理温度和时间分别为350℃和2h时,复合薄膜电极具有优良的综合性能,比表面积为265.7m2/g,比电容最高为421F/g,充放电电流为0.1A时,内阻最高为0.72Ω.
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